Place SEMI standard index tracking codes on wafers to track through processing.


Mark quality and reliability required to support high-volume production.

WaferMark® series laser systems from ESI are the recognized industry leaders for wafer marking applications. We have WaferMark solutions for the two most important reasons why you mark wafers and die — traceability and product identification.

The world’s silicon suppliers, wafer reclaim, and semiconductor manufacturers consistently come to us for unsurpassed mark quality with our hardmark and patented SuperSoftMark® processes.

WAFER MARKING APPLICATIONS


SC300 — Track wafers through the manufacturing process.

The SC300 uses laser technology to place permanent, highly-readable marks on wafers to allow for traceability through the semiconductor processes. The system provides the compatibility, cleanliness levels, mark quality, and reliability required to support high-volume 300 mm production.

learn more about SC300

APPLICATIONS:
  • Soft Mark Wafer Marking
MATERIALS:
  • Silicon

SigmaDSC — 100mm to 200mm Automated Wafer Marking System

The SigmaDSC is based on continual innovation in marking solutions for new substrate materials, highest quality marks and factory automation, using laser technology to place permanent, highly-readable marks on wafers to allow traceability of the wafers through each step in the semiconductor manufacturing process. The SigmaDSC system provides the compatibility, cleanliness levels, mark quality, and reliability required to support high-volume 100mm to 200mm production.

The hard mark process was developed for marking as cut wafers such that the marks will survive subsequent lapping and wafer thinning processes.

The key to the SigmaDSC’s uniform dot depth and roundness is ESI’s precise pulse to pulse stability combined with sufficient power.

learn more about SigmaDSC

APPLICATIONS:
  • Hard Mark Wafer Marking
MATERIALS:
  • Silicon

HM300 — Hard marking 300mm wafers

The HM300 is the industry-leading solution for SEMI-standard compliant hard marking on semiconductor wafers. ESI's control software enables the user to manage much of the system's functionality. HM300's programmable depth control allows for adjusting marking depth, up to 100 µm. 

learn more about HM300

APPLICATIONS:
  • Hard Mark Wafer Marking
MATERIALS:
  • Silicon

SigmaClean — Soft marking 100-200mm wafers

SigmaClean’s Class 1 cleanroom compatibility and ultra-stable patented diode-pumped laser has helped to make it the industry-leading solution for cost-efficient, highly-readable soft marking of 100 mm to 200 mm wafers for identification and traceability. SigmaClean can place multiple mark groups at any orientation on the wafer surface, within a 25mm band around the wafer’s circumference.

learn more about SigmaClean

APPLICATIONS:
  • Soft Mark Wafer Marking
MATERIALS:
  • Silicon